Flexible BioMEMS devices enabled by micromachining of plasma-polymerized fluorocarbon
نویسندگان
چکیده
منابع مشابه
Micromachining of Parylene C for bioMEMS
Recent advances in the micromachining of poly(p-xylylenes), commercially known as Parylenes, have enabled the development of novel structures and devices for microelectromechanical systems (MEMS). In particular, Parylene C (poly[chloro-p-xylylene]) has been explored extensively for biomedical applications of MEMS given its compatibility with micromachining processes, proven biocompatibility, an...
متن کاملDevelopment of Surface Micromachining Technologies for Microfluidics and BioMEMS
In the last decade, examples of devices manufactured with SUMMiT technology have demonstrated the capabilities of polysilicon surface micromachining [1]. Currently we are working on enhancements to this technology that utilize additional structural layers of silicon nitride to enable Microfluidics and BioMEMS applications. The addition of the silicon nitride layers allows the fabrication of mic...
متن کاملstudy of cohesive devices in the textbook of english for the students of apsychology by rastegarpour
this study investigates the cohesive devices used in the textbook of english for the students of psychology. the research questions and hypotheses in the present study are based on what frequency and distribution of grammatical and lexical cohesive devices are. then, to answer the questions all grammatical and lexical cohesive devices in reading comprehension passages from 6 units of 21units th...
Flexible Unicast-Based Group Communication for CoAP-Enabled Devices †
Smart embedded objects will become an important part of what is called the Internet of Things. Applications often require concurrent interactions with several of these objects and their resources. Existing solutions have several limitations in terms of reliability, flexibility and manageability of such groups of objects. To overcome these limitations we propose an intermediately level of intell...
متن کاملImprovement of Power System Condition by Placement of Flexible Alternating Current Transmission Systems devices
Flexible Alternating Current Transmission Systems (FACTS) devices have been used for several targets in power system, one of the main contributions of the devices is improving operation conditions. In this paper, two types of these devices have been placed to raise voltage profile, minimizing system loss and arising loadability. The suggested FACTS devices are: Unified Power Flow Controller (UP...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Micro and nano engineering
سال: 2023
ISSN: ['2590-0072']
DOI: https://doi.org/10.1016/j.mne.2023.100177